China’s EUV radiation source: technological breakthrough aided by ex-ASML engineer

EUV lithography system with purple radiation, symbolizing China’s breakthrough in developing its own radiation source with the help of a former ASML engineer

The image displays a high-precision EUV lithography system emitting characteristic purple radiation onto a silicon wafer. This visual represents the core component of China’s breakthrough — a domestically developed radiation source created with the involvement of a former ASML engineer, marking a strategic advancement amid technological restrictions.

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